Antifuses capable of forming localized conductive links
AssigneeGlobalfoundries Singapore Pte. Ltd.
InventorsZar Lwin Zin, Shyue Seng Tan, Eng Huat Toh
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Abstract
The embodiments herein relate to antifuses capable of forming localized conductive links and methods of forming the same. An antifuse is provided. The antifuse includes a substrate, a dielectric liner, and an electrode. The substrate includes a conductor layer, and a trench is in the conductor layer. The trench includes a first conductor surface and a second conductor surface. The dielectric liner is in the trench. The electrode is on the dielectric liner in the trench, and the electrode includes a first electrode surface and a second electrode surface converging to the first electrode surface.
Claims20
An antifuse, comprising:
- a substrate;
- a conductor layer of the substrate, the conductor layer being a monocrystalline semiconductor layer;
- a trench in the conductor layer, the trench including a first conductor surface and a second conductor surface;
- a dielectric liner in the trench;
- and
- an electrode on the dielectric liner in the trench, the electrode comprises a first electrode surface and a second electrode surface converging to the first electrode surface.
An antifuse, comprising:
- a substrate having an upper substrate surface;
- a conductor layer of the substrate, the conductor layer being a monocrystalline semiconductor layer;
- a trench in the conductor layer, the trench including a first conductor surface and a second conductor surface;
- a dielectric liner in the trench;
- an electrode on the dielectric liner in the trench, the electrode comprises a first electrode surface and a second electrode surface converging to the first electrode surface;
- and
- a conductive link between the conductor layer and the electrode, the conductive link extending through the dielectric liner.
A method of forming an antifuse, comprising:
- forming a trench in a conductor layer of a substrate, the conductor layer being a monocrystalline semiconductor layer;
- forming a dielectric liner conformal lining the trench;
- and
- forming an electrode on the dielectric liner, the electrode comprises a first electrode surface and a second electrode surface converging to the first electrode surface.
Dependencies are inferred from the claim text.