Semiconductor test apparatus

A semiconductor test apparatus comprising:

• a base plate;
• a plurality of side supporters on a lower surface of the base plate;
• an elastic cylinder and a side stopper on a lower surface of each of the plurality of side supporters;
• a supporting frame comprising a first supporting frame and a second supporting frame intersecting with each other at the lower surface of the base plate;
• a center stopper at a position at which the first supporting frame intersects with the second supporting frame, wherein the center stopper is laterally spaced apart from the plurality of side supporters;
• a top plate under the base plate and connected with the elastic cylinder and the side stopper, wherein the top plate comprises a center hole under the center stopper;
• a substrate cover under the top plate;
• an upper zero insertion force (ZIF) connector on a lower surface of the top plate;
• and
• a lower ZIF connector on an upper surface of the substrate cover and coupled to the upper ZIF connector.

A semiconductor test apparatus comprising:

• a base plate;
• a plurality of side supporters on a lower surface of the base plate;
• an elastic cylinder and a side stopper on a lower surface of each of the plurality of side supporters;
• a supporting frame comprising a first supporting frame and a second supporting frame intersecting with each other at the lower surface of the base plate;
• a center stopper at a position at which the first supporting frame intersects with the second supporting frame, wherein the center stopper is laterally spaced apart from the plurality of side supporters;
• a top plate under the base plate and connected with the elastic cylinder and the side stopper, wherein the top plate comprises a center hole under the center stopper;
• a substrate cover under the top plate;
• an upper zero insertion force (ZIF) connector on a lower surface of the top plate;
• a lower ZIF connector on an upper surface of the substrate cover and coupled to the upper ZIF connector;
• a plurality of Belleville springs on the lower surface of the top plate and between the upper ZIF connector and the lower ZIF connector;
• a stopper foot at one end of the center stopper, the stopper foot comprising a ball and a connector;
• a foot supporter connected with one surface of the stopper foot;
• a card information unit at a center of the upper surface of the substrate cover;
• a pneumatic valve comprising a first pneumatic valve and a second pneumatic valve;
• a pneumatic regulator connected with the pneumatic valve through a supply line;
• a controller electrically connected with the first pneumatic valve, the second pneumatic valve, and the pneumatic regulator, wherein the controller is configured to control opening or closing of each of the first pneumatic valve and the second pneumatic valve;
• and
• a pneumatic supply configured to supply pressurized air to the pneumatic valve,
• wherein the one end of the center stopper is inserted into and connected with the ball, and the connector is configured to surround at least a portion of a surface of the ball,
• wherein the foot supporter is provided as a unitary structure with a surface of the connector opposite from the ball,
• wherein the plurality of Belleville springs are fixed to the lower surface of the top plate, a portion of each of the plurality of Belleville springs is configured to contact the lower ZIF connector or the substrate cover, and the plurality of Belleville springs are arranged uniformly around the center hole,
• wherein the foot supporter comprises a supporter groove recessed to an inner portion of the foot supporter in a surface of the foot supporter facing the top plate, and an area of a planar shape of the supporter groove is greater than an area of a planar shape of the card information unit,
• wherein the first pneumatic valve passes through the pneumatic regulator and is connected with the center stopper through a first supply line, and the second pneumatic valve passes through the pneumatic regulator and is connected with the side stopper through a second supply line, and
• wherein an area of a planar shape of the center hole is greater than an area of a planar shape of the foot supporter.