US 12,753,496 B2Granted

Method for controlling canister temperature and raw material supply device

AssigneeJusung Engineering Co., Ltd.

InventorsByung Gwan Lim, Sang Kyo Kwon, Yong Hyun Kim, Jin Hyun Kim, Hong Eun Kim, Il Houng Park, Chang Kyun Park, In Woo Back, Won Ju Oh, Dong Hwan Lee, Yong Hyun Lee, Jun Seok Lee, Seung Hyun Cho, Jeong Heo, Chul Joo Hwang

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Abstract

Disclosed are a raw material supply method including vaporizing a raw material in a canister, discharging the vaporized raw material, measuring an inner temperature of the canister, calculating a calculated temperature by using the inner temperature, and compensating a variation of the inner temperature by heating a heating unit disposed on the canister at the calculated temperature and a raw material supply apparatus applied to the method for supplying the raw material. The raw material supply method and apparatus may stably supply the vaporized raw material to a process space.

Claims9

Dependent claims

A method for controlling a temperature of a canister in a structure of the canister comprising a measurement unit connected with a control unit and a heating unit connected with the control unit and configured to accommodate a raw material therein, comprising:

measuring an inner temperature of the canister;
calculating a calculated temperature by applying the inner temperature of the canister to a calculation equation of the control unit;
and
changing a temperature of the heating unit into the calculated temperature,
wherein the measuring of the inner temperature of the canister comprises measuring a temperature of the raw material in the canister as the inner temperature of the canister,
wherein the calculated temperature is produced from a calculation equation 1 below.
T
C
=
(
T
SET
-
(
T
ML
×
R
ML
)
)
/
(
1
-
R
ML
)
[
Calculation
⁢
equation
⁢
1
]
(wherein, TC is a calculated temperature, TSET is a set temperature, TML is a temperature of the raw material, and RML is a constant between 0 and 1 as a usage rate of the temperature of the raw material).

33 more elements

measuring an inner temperature of the canister;
calculating a calculated temperature by applying the inner temperature of the canister to a calculation equation of the control unit;
and
changing a temperature of the heating unit into the calculated temperature,
wherein the measuring of the inner temperature of the canister comprises measuring a temperature of the raw material in the canister as the inner temperature of the canister,
wherein the calculating of the calculated temperature produces:
the calculated temperature from a calculation equation 1 below from a time at which a predetermined reference time elapses after discharging of a vaporized raw material is initiated, and
the calculated temperature from a calculation equation 2 below from a time at which the discharging of the vaporized raw material is initiated until the reference time:
T
C
=
(
T
SET
-
(
T
ML
×
R
ML
)
)
/
(
1
-
R
ML
)
[
Calculation
⁢
equation
⁢
1
]
T
C
=
(
(
T
SET
+
T
offset
)
-
(
T
ML
×
R
ML
)
)
/
(
1
-
R
ML
)
[
Calculation
⁢
equation
⁢
2
]
(wherein, TC is a calculated temperature, TSET is a set temperature, Toffset is an offset temperature, TML is a temperature of the raw material, and RML is a constant between 0 and 1 as a usage rate of the temperature of the raw material).

69 more elements

Dependencies are inferred from the claim text.