Temporary adhesive material for substrate processing and method for manufacturing laminate

A temporary adhesive material for substrate processing for temporary adhesion of a substrate to a support on a surface of the substrate opposite to a surface to be processed, the material consisting of a first temporary adhesive layer and a second temporary adhesive layer:

• the first temporary adhesive layer comprising a thermoplastic resin;
• and
• the second temporary adhesive layer that is distinct from the first temporary adhesive layer, where
• the temporary adhesive material has a two-layer structure of the first temporary adhesive layer and the second temporary adhesive layer, and
• one of the first temporary adhesive layer and the second temporary adhesive layer, is configured to be temporarily adhered to the support, and has a minimum shear viscosity of 4000 Pa·s or higher and 10,000 Pa·s or lower within a range of 130° C. to 250° C., wherein:
• the temporary adhesive material contains 10 parts by mass or more and 100 parts by mass or less of a siloxane bond-containing polymer having a weight-average molecular weight of 3,000 or more and 700,000 or less as measured by GPC based on a total mass of 100 parts;
• the thermoplastic resin does not contain organopolysiloxane and is selected from at least one of:
• an olefinic thermoplastic elastomer, a polybutadiene type thermoplastic elastomer, a styrenic thermoplastic elastomer, a styrene-butadiene type thermoplastic elastomer, a styrene-polyolefin type thermoplastic elastomer, and a hydrogenated polystyrene type elastomer;
• and
• the siloxane bond-containing polymer contains:
• (p1) an organopolysiloxane having an alkenyl group in a molecule thereof and represented by the following formula (5) and/or formula (6),
• wherein each R13 independently represents a monovalent hydrocarbon group having 1 to 10 carbon atoms and no aliphatic unsaturated bond;
• each X1 independently represents a monovalent organic group having 2 to 10 carbon atoms and containing an alkenyl group;
• and “a” is an integer of 1 to 3;
• in the formula (5), 2a+1 is such a number that a content of alkenyl group is 0.3 to 10 mol % per molecule;
• in the formula (6), 1+2 is such a number that the content of alkenyl group is 0.3 to 10 mol % per molecule;
• “1” is 0 or a positive number of 500 or less, and “r” is a positive number of 1 to 10,000;
• (p2) a trimethylsilyl terminated organohydrogenpolysiloxane having two or more silicon atom-bonded hydrogen atoms (Si—H groups) per molecule, in such an amount that a mole ratio of the Si—H group in the component (p2) to the alkenyl group in the component (p1) ranges from 1 to 8;
• and
• (p3) a platinum-based catalyst.