Method to perform in-situ vacuum contamination measurement and identification in arbitrarily large chambers

A system comprising:

• a primary vacuum chamber;
• a secondary vacuum chamber connected to the primary vacuum chamber via a gate valve, wherein the gate valve is operable between an open position in which the secondary vacuum chamber is in fluid communication with the primary vacuum chamber and a closed position in which the secondary vacuum chamber is sealed from the primary vacuum chamber;
• a vacuum pump in fluid communication with the primary vacuum chamber, wherein the vacuum pump is configured to produce a vacuum pressure in the primary vacuum chamber and the secondary vacuum chamber with the gate valve in the open position and to produce the vacuum pressure in the primary vacuum chamber with the gate valve in the closed position;
• a heat exchanger configured to cool the secondary vacuum chamber to adsorb contaminants from the primary vacuum chamber into the secondary vacuum chamber when the gate valve is in the open position;
• a gas source configured to inject a carrier gas into the secondary vacuum chamber when the gate valve is in the closed position, wherein the heat exchanger is further configured to heat the carrier gas in the secondary vacuum chamber to desorb the contaminants into a gas sample with the carrier gas;
• and
• a sample container configured to collect the gas sample from the secondary vacuum chamber.