Back to results
US 12,749,658 B2Granted
Corrosion resistant polymer coatings for manufacturing equipment components
AssigneeApplied Materials, Inc.
InventorVijay D. Parkhe
Life of this patent
Estimating the term…
Abstract
A chamber component for a semiconductor processing chamber includes a body. The chamber component also includes a coating. The coating is a corrosion-resistant coating. The coating is deposited on a surface of the body. The corrosion-resistant coating includes a perfluoroelastomer material.
Claims16
A chamber component for a semiconductor processing chamber, comprising:
- a body;
- and
- a corrosion-resistant coating deposited on a surface of the body, wherein the corrosion-resistant coating comprises a stack of thin films, and wherein each thin film comprises:
- an organic perfluoroelastomer material, and
- one or more additives, comprising at least one of plasticizers, stabilizers, or ceramic particles, wherein each thin film of the stack of thin films is of a different composition, and wherein a portion of the surface of the body on which the corrosion-resistant coating is deposited extends from a portion of the semiconductor processing chamber configured to generate a controlled environment to a region outside the controlled environment, and is in contact with a sealing component to form a seal.
2 more elements
A processing chamber, comprising:
- A chamber component;
- and
- a corrosion-resistant coating deposited on a surface of the chamber component, the corrosion-resistant coating comprising a stack of thin films, and wherein each thin film comprises:
- an organic corrosion-resistant perfluoroelastomer material, and
- one or more additives, comprising at least one of plasticizers, stabilizers, or ceramic particles, wherein each thin film of the stack of thin films is of a different composition;
- and wherein a portion of the surface of the chamber component on which the corrosion-resistant coating is deposited extends from a portion of the processing chamber configured to generate a controlled environment to region outside the controlled environment, and is configured to be in contact with a sealing component to form a seal.
3 more elements
Dependencies are inferred from the claim text.