Parameter selection method and information processing device
AssigneeTokyo Electron Limited
InventorHidefumi Matsui
Life of this patent
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Abstract
A parameter selection method for causing a computer to execute processing steps including: (a) acquiring a plurality of parameters in measurement data of a plurality of sensors regarding a process in a substrate processing apparatus and result data of the process corresponding to the measurement data; (b) classifying the acquired parameters into a plurality of groups by a specific clustering method; (c) selecting parameters having a large effect on the result data based on a threshold value for each of the plurality of groups; (d) repeating the step of (c) in a tournament format between the groups for the parameters selected for each of the groups; and (e) selecting parameters highly correlated with the result data by correlation analysis between the parameters selected in the step of (d).
Claims11
A parameter selection method for causing a computer to execute processing steps including:
- (a) acquiring a plurality of parameters in measurement data of a plurality of sensors regarding a process in a substrate processing apparatus and result data of the process corresponding to the measurement data;
- (b) classifying the acquired parameters into a plurality of groups by a specific clustering method based on a process step of the process or a cycle representing one iteration of the process;
- (c) selecting parameters having a degree of effect on the result data higher than a threshold value for each of the plurality of groups;
- (d) repeating the step of (c) in a tournament format between the groups for the parameters selected for each of the groups;
- (e) selecting parameters correlated with the result data between the parameters selected in the step of (d) based on a result of a correlation analysis;
- (f) executing the steps of (b), (c), (d) and (e) for each of plural types of specific clustering methods;
- (g) selecting a result of integration of the parameters selected for each of the plural types of specific clustering methods as the parameters having the degree of effect on the result data;
- and
- (i) controlling the substrate processing apparatus to change at least one parameter of the selected parameters selected in the step of (e) to adjust a substrate process condition.
An information processing device, comprising:
- one and more processors configured to execute:
- acquiring a plurality of parameters in measurement data of a plurality of sensors regarding a process in a substrate processing apparatus and result data of the process corresponding to the measurement data;
- classifying the acquired parameters into a plurality of groups by a specific clustering method based on a process step of the process or a cycle representing one iteration of the process;
- selecting parameters having a degree of effect on the result data higher than a threshold value for each of the plurality of groups;
- repeating the selection of the parameters in a tournament format between the groups for the parameters selected for each of the groups;
- selecting parameters correlated with the result data between the parameters selected in the repeating the selection of the parameters based on a result of a correlation analysis;
- executing the classifying the acquired parameters, the selecting parameters having the degree of effect, the repeating the selection of the parameters, and the selecting parameters correlated with the result data, for each of plural types of specific clustering methods;
- selecting a result of integration of the parameters selected for each of the plural types of specific clustering methods as the parameters having the degree of effect on the result data;
- and
- controlling the substrate processing apparatus to change at least one parameter of the selected parameters selected in the selecting parameters correlated with the result data to adjust a substrate process condition.
Dependencies are inferred from the claim text.