In situ film growth sensor assembly, apparatus, and methods
AssigneeApplied Materials, Inc.
InventorsZhepeng Cong, Tao Sheng, Xinning Luan, Enle Choo, Ala Moradian
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Abstract
Embodiments disclosed herein generally relate to in situ monitoring of film growth in processing chambers. In some examples, a sensor assembly for a processing chamber includes a sensor tube including silicon carbide and having an optical path therein and a sensor window including crystalline silicon carbide and having a proximal side coupled to a distal end of the sensor tube. The sensor window covers the optical path, and a distal side of the sensor window facing away from the proximal side is perpendicular to a center axis of the optical path.
Claims17
A processing chamber suitable for use in semiconductor manufacturing, comprising:
- a susceptor;
- and
- a sensor assembly, comprising:
- a sensor tube comprising silicon carbide and having an optical path therein, the sensor tube disposed through a body of a pre-heat ring disposed outwardly of the susceptor;
- a sensor window comprising crystalline silicon carbide and having a proximal side coupled to a distal end of the sensor tube, wherein the sensor window covers the optical path, and wherein a distal side of the sensor window facing away from the proximal side is perpendicular to a center axis of the optical path;
- a sleeve disposed around a proximal end of the sensor tube, the sleeve comprising a vent formed in a wall of the sleeve, the vent including an opening extending from an outer surface of the wall and to an inner surface of the wall;
- and
- one or more fiber optic cables disposed in tubing, the one or more fiber optic cables operable to transmit light.
A processing chamber suitable for use in semiconductor manufacturing, comprising:
- a chamber body, comprising:
- an upper window, a lower window, and a side wall defining a processing region;
- a process gas inlet formed through the side wall;
- a susceptor disposed in the processing region and having a substrate-receiving top surface;
- a pre-heat ring surrounding the susceptor;
- a rotatable shaft supporting the susceptor;
- and
- a sensor assembly, comprising:
- a sensor tube comprising silicon carbide and having an optical path therein, the sensor tube disposed through a body of the pre-heat ring;
- and
- a sensor window comprising crystalline silicon carbide and having a proximal side coupled to a distal end of the sensor tube, wherein the sensor window covers the optical path, and wherein a distal side of the sensor window facing away from the proximal side is perpendicular to a center axis of the optical path;
- a sleeve disposed around a proximal end of the sensor tube, the sensor tube extending into a distal end of the sleeve, the sleeve comprising a vent formed in a wall of the sleeve, the vent including an opening extending from an outer surface of the wall and to an inner surface of the wall, and the sleeve and the sensor tube disposed between the lower window and the upper window of the chamber body;
- and
- one or more fiber optic cables disposed in tubing, the one or more fiber optic cables operable to transmit light, and the tubing and the one or more fiber optic cables disposed outside of the lower window.
Dependencies are inferred from the claim text.