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US 12,745,600 B2Granted
Method and device for the alignment of a substrate
AssigneeEV Group E. Thallner GmbH
InventorsThomas Wagenleitner, Harald Rohringer
Life of this patent
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Abstract
The invention relates to a method and a device for the alignment of a substrate.
Claims14
A method for alignment of a substrate, comprising:
- providing a substrate holder with a substrate holder surface designed for mounting of the substrate and an alignment marking field arranged fixed with respect to the substrate holder;
- providing another substrate holder with another substrate holder surface designed for mounting of another substrate to be bonded to the substrate;
- aligning the substrate to set a bonding distance between the substrate and the other substrate as a bond gap, comprising:
- detecting a first alignment mark of a first plane of the alignment marking field by a detection unit;
- fixing a focal position of the detection unit after the detecting of the first alignment mark;
- moving the substrate holder normal to the first plane of the alignment marking field;
- and
- detecting a second alignment mark of a second plane of the alignment marking field by the detection unit,
- wherein the substrate is aligned using the alignment marks of the alignment marking field arranged one above the other,
- wherein the first plane and the second plane are arranged parallel with one another, and
- wherein a distance between the first plane and the second plane corresponds with the bond gap.
8 more elements
A device for alignment of a substrate, comprising:
- a substrate holder with a substrate holder surface designed for mounting of the substrate;
- another substrate holder with another substrate holder surface designed for mounting of another substrate to be bonded to the substrate;
- an alignment marking field with alignment marks arranged fixed with respect to the substrate holder and to the substrate;
- a detection unit for detecting the alignment marks of the alignment marking field;
- and
- a movement arrangement for moving the substrate holder,
- wherein the substrate is aligned using the alignment marks arranged one above the other to set a bonding distance between the substrate and the other substrate as a bond gap,
- wherein the alignment marks of the alignment marking field are arranged in a first plane and a second plane,
- wherein the first plane and the second plane are arranged parallel with one another,
- wherein a distance between the first plane and the second plane corresponds with the bond gap,
- wherein a first alignment mark of the alignment marks of the first plane is detected in a focal position of the detection unit,
- wherein the focal position of the detection unit is fixed,
- wherein a second alignment mark of the alignment marks of the second plane is detected in the focal position by the detection unit, and
- wherein the substrate holder is moved normal to the first plane by the movement arrangement.
11 more elements
Dependencies are inferred from the claim text.