Nanosheet 3D transistor for advanced memory elements
AssigneeTokyo Electron Limited
InventorsPartha Mukhopadhyay, Henry Jim Fulford, Mark I. Gardner
Life of this patent
Estimating the term…
Loading patent…
AssigneeTokyo Electron Limited
InventorsPartha Mukhopadhyay, Henry Jim Fulford, Mark I. Gardner
Estimating the term…
Semiconductor devices and corresponding methods of manufacture are disclosed. The semiconductor device includes a first metal structure extending in a first lateral direction. The semiconductor device includes a first ferroelectric layer surrounding a first portion of the first metal structure. The semiconductor device includes a first channel layer surrounding the first ferroelectric layer. The semiconductor device includes a first gate structure surrounding the first portion of the first metal structure, with the first ferroelectric layer and the first channel layer interposed therebetween. The semiconductor device includes a first gate electrode in electrical contact with the first gate structure. The semiconductor device includes a second gate electrode in electrical contact with a second portion of the first metal structure.
A semiconductor device, comprising:
A semiconductor device, comprising:
A method for fabricating semiconductor devices, comprising:
Dependencies are inferred from the claim text.