Heater and single crystal growing apparatus
AssigneeXi'an Eswin Material Technology Co., Ltd.
InventorWenwu Yang
Life of this patent
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Abstract
A heater that may be included in a single crystal growing apparatus includes a heating body. The heating body has a bowl shape and has a bottom having an opening. The heating body is divided into a first heating zone and a second heating zone in the circumferential direction. The first heating zone includes a first main heating area and the second heating zone includes a second main heating area. The first main heating area and the second main heating area are located at different position with different heights in the axial direction of the heating body.
Claims14
A heater comprising a heating body;
- wherein the heating body has a bowl shape which is adapted to a shape of a crucible, distances between different portions of the heating body and corresponding portions of the crucible are the same, and a bottom of the heating body is provided with an opening;
- wherein the heating body is provided with a first heating zone and a second heating zone in a circumferential direction, the first heating zone comprises a first main heating area and the second heating zone comprises a second main heating area, and the first main heating area and the second main heating area are located at different positions with different heights in an axial direction of the heating body,
- wherein the heating body comprises a straight cylinder portion and an arc-shaped portion which are arranged up and down in the axial direction of the heating body and integrated as a whole, the first main heating area in the first heating zone is located in the straight cylinder portion, and the second main heating area in the second heating zone is located in the arc-shaped portion, and
- wherein a heating efficiency of the second main heating area in the second heating zone is greater than the heating efficiency of the first main heating area in the first heating zone;
- a heating power of the first main heating area is greater than the heating power of other areas in the first heating zone except the first main heating area;
- the heating power of the second main heating area is greater than the heating power of other areas in the second heating zone except the second main heating area.
A single crystal growing apparatus comprising a heater,
- wherein the heater comprises a heating body;
- wherein the heating body has a bowl shape which is adapted to a shape of a crucible, distances between different portions of the heating body and corresponding portions of the crucible are the same, and a bottom of the heating body is provided with an opening;
- and
- wherein the heating body is provided with a first heating zone and a second heating zone in a circumferential direction, the first heating zone comprises a first main heating area and the second heating zone comprises a second main heating area, and the first main heating area and the second main heating area are located at different positions with different heights in an axial direction of the heating body,
- wherein the heating body comprises a straight cylinder portion and an arc-shaped portion which are arranged up and down in the axial direction of the heating body and integrated as a whole, the first main heating area in the first heating zone is located in the straight cylinder portion, and the second main heating area in the second heating zone is located in the arc-shaped portion, and
- wherein a heating efficiency of the second main heating area in the second heating zone is greater than the heating efficiency of the first main heating area in the first heating zone;
- a heating power of the first main heating area is greater than the heating power of other areas in the first heating zone except the first main heating area;
- the heating power of the second main heating area is greater than the heating power of other areas in the second heating zone except the second main heating area.
Dependencies are inferred from the claim text.