US 12,742,239 B2Granted

Cooling frame for diffuser

AssigneeApplied Materials, Inc.

InventorsJong Yun Kim, William Nehrer, Sang Jeong Oh, Han Byoul Kim

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Abstract

Exemplary substrate processing chambers may include a chamber body defining a processing region. The chambers may include a backing plate disposed atop the chamber body, a diffuser above the processing region and supported by the backing plate, and a cooling frame disposed between the backing plate and the diffuser. The cooling frame may be coupled with the diffuser. The cooling frame may include a body having one or more fluid inlets and one or more fluid outlets. The body may define an opening. The fluid inlets may be in fluid communication with the one or more fluid outlets via one or more fluid lumens that each extend at least partially about a periphery of the opening. The fluid inlets may be in fluid communication with one or more fluid supply lumens. The fluid outlets may be in fluid communication with one or more fluid return lumens.

Claims20

Dependent claims

A diffuser cooling frame, comprising:

a body having two or more fluid inlets and two or more fluid outlets, wherein:
the body defines an opening;
the two or more fluid inlets are in fluid communication with the two or more fluid outlets via two or more fluid lumens;
and
the two or more fluid lumens form two or more fluid passageways around an outer perimeter of the body of the diffuser cooling frame;
and
wherein the two or more fluid lumens each connect one of the fluid inlets to a respective one of the fluid outlets, wherein:
a first fluid lumen, of the two or more fluid lumens, extends about substantially all of an outer periphery of the opening;
a second fluid lumen, of the two or more fluid lumens, extends about substantially all of the outer periphery of the opening, wherein the second fluid lumen is disposed radially inward of the first fluid lumen;
a first fluid path defined by a first fluid lumen of the two or more fluid lumens extends clockwise around the body of the diffuser cooling frame;
and
a second fluid path defined by a second fluid lumen of the two or more fluid lumens extends counter-clockwise around the body of the diffuser cooling frame.

9 more elements

Dependencies are inferred from the claim text.

Facts

Application: 18/717,165Filed 6 Dec 2021
Published: US 2025/0019824 A116 Jan 2025
Granted: 22 Sep 2026
Term ends: Not estimatedThe source records don’t support an estimate.

Classification4 codes

C23C 16/4411
Characterised by the method of coating: cooling of the reaction chamber walls
C23C 16/45559
Characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber: diffusion of reactive…
C23C 16/505
Using electric discharges: using radio frequency discharges
C23C
Coating metallic material