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US 12,740,382 B2Granted
Test key structure
AssigneeUnited Semiconductor (Xiamen) Co., Ltd.
InventorsJin Hui Yu, Rong He, Hailong Gu, You-Di Jhang, Wen Yi Tan
Life of this patent
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Abstract
A test key structure includes a substrate; a first metal pad disposed on the substrate; a second metal pad disposed in proximity to the first metal pad on the substrate; a gap between the first metal pad and the second metal pad; a first contact disposed on the first metal pad; and a second contact disposed on the second metal pad.
Claims7
A test key structure configured to detect a short circuit caused by metal residues, comprising:
- a substrate;
- a first metal pad disposed on the substrate;
- a second metal pad disposed in proximity to the first metal pad on the substrate, wherein the first metal pad and the second metal pad have a dimension of equal to or greater than 1 μm×1 μm;
- a gap between the first metal pad and the second metal pad, wherein the gap has width of equal to or less than 0.15 μm;
- a first contact disposed on the first metal pad, wherein the first contact is electrically connected to a first voltage;
- and
- a second contact disposed on the second metal pad, wherein the second contact is electrically connected to a second voltage that is different from the first voltage to detect the short circuit across the gap.
4 more elements
A test key structure configured to detect a short circuit caused by metal residues, comprising:
- a substrate;
- an array of metal pads disposed on the substrate, wherein each of the array of metal pads has a dimension of equal to or greater than 1 μm×1 μm;
- a gap between the array of metal pads, wherein the gap has width of equal to or less than 0.15 μm;
- and
- an array of contacts disposed on the array of metal pads, respectively, wherein the array of contacts comprises first contacts electrically connected to a first voltage and second contacts electrically connected to a second voltage that is different from the first voltage to detect the short circuit across the gap.
2 more elements
Dependencies are inferred from the claim text.