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US 12,740,378 B2Granted
Ceramic susceptor
AssigneeMiCo Ceramics Ltd.
InventorsMina Cho, Eunbi Kim
Life of this patent
Estimating the term…
Abstract
Disclosed is to a ceramic susceptor. The ceramic susceptor of the present disclosure may include: a base substrate having a gas flow path configured to supply cooling gas; an insulating plate fixed on the base substrate and having a gas hole penetrating the insulating plate in the thickness direction thereof; and a discharge prevention pin inserted into the gas hole and extending in the length direction of the gas hole.
Claims10
A ceramic susceptor comprising:
- a base substrate including a pore structure disposed therein, the pore structure having a gas flow path configured to supply cooling gas, wherein the gas flow path is a through hole;
- an insulating plate fixed on the base substrate and having a gas hole penetrating the insulating plate in a thickness direction;
- and
- a discharge prevention pin inserted into the gas hole and extending in a length direction of the gas hole,
- wherein the gas hole and the through hole are in fluid communication,
- wherein the discharge prevention pin extends through the gas hole to at least a portion of the through hole, and
- wherein the discharge prevention pin includes an Al2O3—SiC composite material, and the Al2O3—SiC composite material has a volume resistance of 1E14 Ωcm or higher at 200 °C.
4 more elements
A ceramic susceptor comprising:
- a base substrate including a pore structure disposed therein, the pore structure having a gas flow path configured to supply cooling gas, wherein the gas flow path is a through hole;
- an insulating plate fixed on the base substrate and having a gas hole penetrating the insulating plate in a thickness direction thereof;
- and
- a discharge prevention pin disposed in the gas hole and extending in a length direction of the gas hole, such that a space is formed between an inner surface of the gas hole and an outer surface of the discharge prevention pin,
- wherein the gas hole and the through hole are in fluid communication, and
- wherein the discharge prevention pin extends through the gas hole to at least a portion of the through hole,
- wherein the discharge prevention pin includes an Al2O3-SiC composite material, and the Al2O3-SiC composite material has a volume resistance of 1E14 Ωcm or higher at 200 °C.
4 more elements
Dependencies are inferred from the claim text.