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US 12,740,377 B2Granted
Substrate support unit, and apparatus and method for depositing a layer using the same
AssigneeEvatec AG
InventorsFlorian Hagmann, Klaus Mündle, Andreas Mark
Life of this patent
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Abstract
A substrate support unit including a turntable which is rotatable around a first axis and which is driven by a first drive. A plurality of substrate carrier units are arranged concentric to the first axis on the turntable. Each of the plurality of substrate carrier units includes a substrate carrier which is rotatable around a corresponding second axis and which is driven by a second drive, wherein all second axes are parallel to the first axis.
Claims19
A substrate support unit comprising:
- a driver;
- a turntable which is rotatable around a first axis and which is driven by the driver;
- and
- a plurality of substrate carrier units arranged concentric to the first axis on the turntable, each of the plurality of substrate carrier units comprising a motor and a substrate carrier which is rotatable around a corresponding second axis and which is driven by the motor,
- wherein all second axes are parallel to the first axis,
- wherein the turntable comprises a disk-shaped upper table plate with a plurality of holes, wherein each hole of the plurality of holes receives one substrate carrier unit,
- wherein each hole of the plurality of holes is arranged concentric to the first axis, and wherein each substrate carrier unit comprises a housing in which the motor is received and with which each substrate carrier unit is arranged in a corresponding hole of the turntable.
4 more elements
A substrate support unit, comprising:
- a driver;
- a turntable which is rotatable around a first axis and which is driven by the driver;
- and
- a plurality of substrate carrier units arranged concentric to the first axis on the turntable, each of the plurality of substrate carrier units comprising a motor having a first shaft and a second shaft, a housing, and a substrate carrier which is rotatable around a corresponding second axis and which is driven by the motor, wherein all the second axes are parallel to the first axis,
- wherein a mounting flange is arranged slidably along the second axis on the first shaft of the motor,
- wherein a position flag is arranged on the second shaft of the motor, wherein the second shaft is colinear to the first shaft and exits the motor on its side opposite to the first shaft,
- wherein the position flag is disk-shaped, extends beyond a width of the motor and comprises at least one opening that extends over a portion of a circumference of a part of the position flag that extends beyond the width of the motor,
- and wherein a reflector is arranged in the housing of the substrate carrier unit adjacent to the motor, the reflector is arranged such that in a plane perpendicular to the first axis, a connecting line of the first axis and the corresponding second axis, is essentially perpendicular to a connecting line between the second axis and the reflector, and the reflector faces the position flag.
5 more elements
A substrate support unit comprising:
- a driver;
- a turntable which is rotatable around a first axis and which is driven by the driver;
- and
- a plurality of substrate carrier units arranged concentric to the first axis on the turntable, each of the plurality of substrate carrier units comprising a motor and a substrate carrier which is rotatable around a corresponding second axis and which is driven by the motor, wherein all second axes are parallel to the first axis,
- wherein each substrate carrier comprises a circular disk,
- wherein an upper shield having circular cut-outs, each of the circular cut-outs surrounding a corresponding one of the circular disks, is arranged around the substrate carriers, covering a top surface of the turntable, and
- wherein a top surface of the upper shield is essentially flush with the top surface of the substrate carriers.
4 more elements
A substrate support unit, comprising:
- a driver;
- a turntable which is rotatable around a first axis and which is driven by the driver;
- an optical sensor arranged below the turntable;
- a plurality of substrate carrier units arranged concentric to the first axis on the turntable, each of the plurality of substrate carrier units comprising a motor and a substrate carrier which is rotatable around a corresponding second axis and which is driven by the motor, wherein all second axes are parallel to the first axis;
- and
- a substrate lift comprising pins and a lifter,
- wherein each substrate carrier unit comprises a housing and a reflector arranged in the housing in which the motor is received, with which each substrate carrier unit is arranged in a corresponding hole of the turntable,
- wherein a position flag is arranged on the shaft of the motor,
- wherein in a loading position in order to lift substrates from or lower substrates onto the substrate carrier, the turntable and one of the substrate carrier units are oriented such that the pins can pass through corresponding through holes in a table plate and the substrate carrier, and
- wherein the position flag together with the reflector and the optical sensor allow for determination of the orientation.
7 more elements
Dependencies are inferred from the claim text.