Methods and systems for a spectral library at a manufacturing system

A system comprising:

• a memory;
• and
• a processing device coupled to the memory, wherein the processing device is to perform operations comprising:
• identifying spectral data associated with a substrate processed at a process chamber of a manufacturing system according to one or more first operations of a process recipe, wherein the process recipe is unknown to a system controller for the manufacturing system, and wherein the spectral data is generated based on one or more measurements of a substrate measurement subsystem for the process chamber;
• determining the process recipe associated with the substrate based on the identified spectral data;
• identifying one or more second operations of the process recipe for the substrate;
• and
• causing the substrate to be processed according to the one or more second operations of the process recipe.

A non-transitory computer readable medium comprising instructions, which when executed by a processing device, cause the processing device to perform operations comprising:

• identifying spectral data associated with a substrate processed at a process chamber of a manufacturing system according to one or more first operations of a process recipe, wherein the process recipe is unknown to a system controller for the manufacturing system, and wherein the spectral data is generated based on one or more measurements of a substrate measurement subsystem for the process chamber;
• determining the process recipe associated with the substrate based on the identified spectral data;
• identifying one or more second operations of the process recipe for the substrate;
• and
• causing the substrate to be processed according to the one or more second operations of the process recipe.