Semiconductor measurement apparatus

A semiconductor measurement apparatus comprising:

• an illuminator configured to emit output light;
• a stage configured to position a semiconductor test object such that the output light from the illuminator is incident thereon;
• a camera configured to receive light that is reflected or scattered from the semiconductor test object or is transmitted through the semiconductor test object;
• and
• a controller configured to measure an intensity of a signal output by the camera, in response to setting an exposure time of the camera to a reference exposure time and setting a wavelength band of the output light from the illuminator to each of a plurality of wavelength bands,
• wherein the controller is configured to compare intensity of respective signals output by the camera in each of the plurality of wavelength bands with a predetermined target intensity and determine respective exposure times of the camera responsive thereto, wherein the respective exposure times for at least some of the plurality of wavelength bands are different from each other such that the plurality of wavelength bands produced by the illuminator each have substantially a same intensity to the camera.