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US 12,736,431 B2Granted
Method of detecting leakage of substrate holder
AssigneeEbara Corporation
InventorsYosuke Nagasawa, Tensei Sato, Ryuya Koizumi
Life of this patent
Estimating the term…
Abstract
There is provided a method of detecting a leakage of a substrate holder in an apparatus for plating. The method of detecting the leakage comprises: placing the substrate holder that holds a substrate, into a tank that is filled with a liquid; supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate; and taking an image of the liquid surrounding the substrate holder in a state that the internal space of the substrate holder is pressurized by the gas and analyzing one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid and thereby detect a leakage of the substrate holder.
Claims20
A method of detecting a leakage that detects a leakage of a substrate holder in an apparatus for plating, the method of detecting the leakage comprising:
- placing the substrate holder that holds a substrate, into a tank that is filled with a liquid;
- supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate;
- and
- taking an image of the liquid surrounding the substrate holder in a state that the internal space of the substrate holder is pressurized by the gas and analyzing one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid to detect a leakage of the substrate holder,
- wherein a reference image without any leakage is provided, and wherein the taking the image of the liquid to detect a leakage of the substrate holder compares the one or plurality of taken images with the reference image, and when a ratio of different pixels exceeds a reference value in a predetermined number of images, determines that gas bubbles are present in the liquid and that the substrate holder has a leakage.
2 more elements
A method of detecting a leakage that detects a leakage of a substrate holder in an apparatus for plating, the method of detecting the leakage comprising:
- placing the substrate holder that holds a substrate, into a tank that is filled with a liquid;
- supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate;
- and
- taking an image of the liquid surrounding the substrate holder in a state that the internal space of the substrate holder is pressurized by the gas and analyzing one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid to detect a leakage of the substrate holder,
- wherein the taking the image of the liquid to detect a leakage of the substrate holder comprises:
- perform machine learning of a program configured to detect a leakage of the substrate holder by using a plurality of images determined to be without any leakage and with a leakage of the substrate holder, as teacher data, and
- wherein the taking the image of the liquid to detect a leakage of the substrate holder analyzes the one or plurality of taken images by the program to determine presence or absence of a leakage of the substrate holder.
4 more elements
A method of detecting a leakage that detects a leakage of a substrate holder in an apparatus for plating, the method of detecting the leakage comprising:
- placing the substrate holder that holds a substrate, into a tank that is filled with a liquid;
- supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate;
- and
- taking an image of the liquid surrounding the substrate holder in a state that the internal space of the substrate holder is pressurized by the gas and analyzing one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid to detect a leakage of the substrate holder,
- wherein the method comprises:
- using a substrate that is to be actually plated, to perform detection of a leakage of the substrate holder that has been processed by a leakage detection process using the test substrate.
3 more elements
A method of detecting a leakage that detects a leakage of a substrate holder in an apparatus for plating, the method of detecting the leakage comprising:
- placing the substrate holder that holds a substrate, into a tank that is filled with a liquid;
- supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate;
- and
- taking an image of the liquid surrounding the substrate holder in a state that the internal space of the substrate holder is pressurized by the gas and analyzing one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid to detect a leakage of the substrate holder,
- wherein the method further comprises:
- detecting the pressure in the internal space of the substrate holder when the gas is supplied into the internal space of the substrate holder;
- and
- when the detected pressure does not reach a predetermined reference value, detecting a leakage of the substrate holder.
5 more elements
A method of detecting a leakage that detects a leakage of a substrate holder in an apparatus for plating, the method of detecting the leakage comprising:
- placing the substrate holder that holds a substrate, into a tank that is filled with a liquid;
- supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate;
- and
- taking an image of the liquid surrounding the substrate holder in a state that the internal space of the substrate holder is pressurized by the gas and analyzing one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid to detect a leakage of the substrate holder,
- wherein the method further comprises:
- detecting an increase in the pressure in the internal space of the substrate holder in a predetermined time period when the gas is supplied into the internal space of the substrate holder;
- and
- when the increase in the pressure in the internal space of the substrate holder in a predetermined time period does not reach a predetermined reference value and no gas bubbles in the liquid are detected, detecting an abnormality of the substrate holder.
5 more elements
A method of detecting a leakage that detects a leakage of a substrate holder in an apparatus for plating, the method of detecting the leakage comprising:
- placing the substrate holder that holds a substrate, into a tank that is filled with a liquid;
- supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate;
- and
- taking an image of the liquid surrounding the substrate holder in a state that the internal space of the substrate holder is pressurized by the gas and analyzing one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid to detect a leakage of the substrate holder,
- wherein the supplying the gas into the internal space of the substrate holder comprises setting an upper limit value of the pressure in the internal space of the substrate holder to a range that does not cause a leakage by deformation of the substrate due to an increase in the pressure in the internal space.
2 more elements
A method of detecting a leakage that detects a leakage of a substrate holder in an apparatus for plating, the method of detecting the leakage comprising:
- placing the substrate holder that holds a substrate, into a tank that is filled with a liquid;
- supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate;
- and
- taking an image of the liquid surrounding the substrate holder in a state that the internal space of the substrate holder is pressurized by the gas and analyzing one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid to detect a leakage of the substrate holder,
- wherein the method further comprising changing the pressure in the internal space of the substrate holder by controlling supply and discharge of the gas into and from the internal space, and
- wherein the changing the pressure in the internal space of the substrate holder comprises setting a range of the change in the pressure in the internal space of the substrate holder to a range that does not cause a leakage by deformation of the substrate due to the change in the pressure.
3 more elements
A non-volatile storage medium configured to store therein a program that causes a computer to perform a command for detecting a leakage of a substrate holder in an apparatus for plating, wherein the command comprises:
- placing the substrate holder that holds a substrate, into a tank that is filled with a liquid;
- supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate;
- and
- taking an image of the liquid surrounding the substrate holder in a state that the internal space of the substrate holder is pressurized by the gas and analyzing one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid and detect a leakage of the substrate holder,
- wherein a reference image without any leakage is provided, and wherein the taking the image of the liquid to detect a leakage of the substrate holder compares the one or plurality of taken images with the reference image, and when a ratio of different pixels exceeds a reference value in a predetermined number of images, determines that gas bubbles are present in the liquid and that the substrate holder has a leakage.
2 more elements
A method of detecting a leakage that detects a leakage of a substrate holder in an apparatus for plating, the method of detecting the leakage comprising:
- placing the substrate holder that holds a substrate, into a tank that is filled with a liquid;
- supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate;
- and
- taking an image of the liquid surrounding the substrate holder in a state that the internal space of the substrate holder is pressurized by the gas and analyzing one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid to detect a leakage of the substrate holder,
- wherein the method comprises:
- using a substrate that is to be actually plated, to perform detection of a leakage of the substrate holder with the substrate holder holding the substrate that is to be actually plated.
3 more elements
An apparatus for detecting a leakage that detects a leakage of a substrate holder in an apparatus for plating, the apparatus for detecting the leakage comprising:
- a gas injection device configured to supply a gas into an internal space of a substrate holder that holds a substrate;
- one or a plurality of cameras configured to take an image of a liquid surrounding the substrate holder in a state that the substrate holder having the internal space pressurized by the gas is soaked in the liquid in a tank;
- a control device configured to analyze one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid and to detect a leakage of the substrate holder;
- and
- a memory that stores a reference image without any leakage,
- wherein the control device compares the one or plurality of taken images with the reference image, and when a ratio of different pixels exceeds a reference value in a predetermined number of images, determines that gas bubbles are present in the liquid and that the substrate holder has a leakage.
3 more elements
A method of plating, comprising:
- detecting a leakage of a substrate holder in an apparatus for plating, the method of detecting the leakage comprising:
- placing the substrate holder that holds a substrate, into a tank that is filled with a liquid;
- supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate;
- and
- taking an image of the liquid surrounding the substrate holder in a state that the internal space of the substrate holder is pressurized by the gas while changing the pressure in the internal space of the substrate holder by controlling supply and discharge of the gas into and from the internal space, and analyzing one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid to detect a leakage of the substrate holder,
- causing a substrate that is to be actually plated, to be held by the substrate holder, and performing a plating process of the substrate in a state that a gas is supplied into an internal space of the substrate holder to prevent a leakage of the substrate holder and/or to suppress the liquid from entering the internal space of the substrate holder.
3 more elements
Dependencies are inferred from the claim text.