Mask, mask assembly having the same, and method of repairing the mask
AssigneeSamsung Display Co., Ltd.
InventorsJeongkuk Kim, Youngmin Moon, Seungyong Song, Eunbee Jo
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AssigneeSamsung Display Co., Ltd.
InventorsJeongkuk Kim, Youngmin Moon, Seungyong Song, Eunbee Jo
Estimating the term…
A method of repairing a mask includes providing a mask including a mother member, a plurality of first openings, and an over-processed opening adjacent to one of the plurality of first openings and having a size different from a size of each of the plurality of first openings, each of the plurality of first openings and the over-processed opening defined on the mother member, forming a supplement portion in at least a portion of the over-processed opening by irradiating a first laser beam to an area surrounding the over-processed opening of the mother member, and forming a plurality of second openings spaced apart from each other on the mother member by irradiating a second laser beam to the supplement portion.
A method of repairing a mask, comprising:
Dependencies are inferred from the claim text.