Methods of making nanopowders, nanoceramic materials and nanoceramic components

A method of forming a nanoceramic coating on a chamber component for a processing chamber, comprising:

• plasma spraying a nanopowder onto a surface of the chamber component, wherein the nanopowder comprises a plurality of nanoparticles, at least a portion of the plurality of nanoparticles comprising:
• a core particle comprising a first material comprising a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, zirconium oxide, or a combination thereof;
• and
• a thin film coating over the core particle, the thin film coating comprising a second material comprising a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, zirconium oxide, or a combination thereof,
• wherein the thin film coating is conformal to the core particle, and
• wherein at least one of the first material or the second material comprises a rare earth metal-containing fluoride or a rare earth metal-containing oxyfluoride.

A method of forming a nanoceramic coating on a chamber component for a processing chamber, comprising:

• plasma spraying a nanopowder onto a surface of the chamber component, wherein the nanopowder comprises a plurality of nanoparticles, at least a portion of the plurality of nanoparticles comprising:
• a core particle comprising a first material comprising a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, zirconium oxide, or a combination thereof;
• and
• a thin film coating over the core particle, the thin film coating comprising a second material comprising a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, zirconium oxide, or a combination thereof,
• wherein the thin film coating has a thickness of about 1 nm to about 500 nm, and
• wherein at least one of the first material or the second material comprises a rare earth metal-containing fluoride or a rare earth metal-containing oxyfluoride.