Laminate, release agent composition, and method for producing processed semiconductor substrate
AssigneeNissan Chemical Corporation
InventorsTakahisa Okuno, Takahiro Kishioka, Tetsuya Shinjo
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AssigneeNissan Chemical Corporation
InventorsTakahisa Okuno, Takahiro Kishioka, Tetsuya Shinjo
Estimating the term…
A laminate that includes a semiconductor substrate; a support substrate that is light-transmissive; an adhesive layer; and a release layer provided between the semiconductor substrate and the support substrate, the laminate being used when the release layer absorbs light irradiated from a side of the support substrate and then the semiconductor substrate and the support substrate are separated from each other, wherein the release layer is formed from a release agent composition, the release agent composition contains a light-absorbing compound having a molecular weight of 2,000 or less, and when the light-absorbing compound is measured for an absorption spectrum in a range of 250 to 800 nm, the absorption spectrum has a local maximum value, which is a maximum absorbance in a range of 250 to 800 nm, between 250 nm and 350 nm.
A laminate comprising:
A release agent composition that is, in a laminate including a semiconductor substrate;
Dependencies are inferred from the claim text.