Pin lifting device
AssigneeVAT Holding AG
InventorMichael Dür
Life of this patent
Estimating the term…
Abstract
A pin lifting device (1) for lowering a substrate (2) onto a substrate carrier (15) and for lifting the substrate (2) off the substrate carrier (15) in a process chamber, in particular a vacuum process chamber. The pin lifting device (1) includes at least one lifting pin holder (4) and at least one lifting drive (5) for moving the lifting pin holder (4), which has a lifting pin (6) mounted thereon, in a reciprocating manner along a linear lifting motion path (7). The lifting pin holder (4) is mounted on the lifting drive (5) by a compensation bearing (8), and the compensation bearing (8) facilitates a relative movement between the lifting drive (5) and the lifting pin holder (4) in at least one direction (9) orthogonal to the linear lifting motion path (7).
Claims18
A pin lifting device for lowering a substrate onto a substrate carrier and for lifting the substrate off the substrate carrier in a process chamber, the pin lifting device comprising:
- at least one lifting pin holder;
- at least one lifting drive configured to move the lifting pin holder and a lifting pin disposed thereon back and forth along a linear lifting motion path;
- a compensation bearing by which the lifting pin holder is mounted on the lifting drive, the compensation bearing enables a relative movement between the lifting drive and the lifting pin holder in at least one direction orthogonal to the linear lifting motion path;
- and
- a pre-tensioning device configured to elastically pre-tension the lifting pin holder in the compensation bearing in a direction coaxial with or parallel to the lifting motion path.
A pin lifting device for lowering a substrate onto a substrate carrier and for lifting the substrate off the substrate carrier in a process chamber, the pin lifting device comprising:
- at least one lifting pin holder;
- at least one lifting drive configured to move the lifting pin holder and a lifting pin disposed thereon back and forth along a linear lifting motion path;
- a compensation bearing by which the lifting pin holder is mounted on the lifting drive, the compensation bearing enables a relative movement between the lifting drive and the lifting pin holder in at least one direction orthogonal to the linear lifting motion path;
- and
- a pre-tensioning device configured to elastically pre-tension the lifting pin holder in the compensation bearing in a direction coaxial with or parallel to the lifting motion path, the pre-tensioning device including a pre-tensioning collar and a pre-tensioning cup and spring collars disposed therebetween.
Dependencies are inferred from the claim text.