Substrate transfer method

A substrate transfer method comprising:

• simultaneously receiving a first substrate and a second substrate by a pick of a first transfer device;
• detecting a first shift amount of the first substrate and a second shift amount of the second substrate that are held by the pick;
• calculating a correction amount of a delivery position of the pick of the first transfer device based on the first shift amount of the first substrate and correcting the delivery position of the pick of the first transfer device based on the correction amount;
• moving the pick of the first transfer device to the corrected delivery position of the pick to deliver the first substrate to a first mounting section of a second chamber and deliver the second substrate to a second mounting section of the second chamber, the first substrate and the second substrate being simultaneously held by the pick of the first transfer device after the receiving of the first substrate and the second substrate;
• moving a first pick of a second transfer device to a receiving position of the first mounting section to receive the first substrate by the first pick;
• calculating a receiving correction amount of a receiving position of a second pick of the second transfer device based on the correction amount of the delivery position of the pick and the second shift amount of the second substrate and correcting the receiving position of the second pick based on the receiving correction amount;
• and
• moving the second pick of the second transfer device to the corrected receiving position of the second pick to receive, by the second pick, the second substrate that is delivered by the first transfer device.