Container stopper, substrate processing system including the same, and substrate processing method using the same

A substrate processing system comprising a container stopper, wherein the container stopper comprises:

• a first gear having a first axis extended in a first direction;
• a second gear spaced apart from the first axis in a horizontal direction crossing the first direction;
• a tube coupler coupled to the first gear;
• and
• an insertion tube extended from the tube coupler in a downward direction,
• wherein the tube coupler comprises:
• a coupler body coupled to the first gear to be rotatable in relation to the first gear;
• and
• a first tube fastener, which is placed on and coupled to the coupler body and is connected to the insertion tube,
• wherein the first gear has a female thread structure formed on an inner side surface of the first gear, and
• wherein the second gear has a rotary coupling structure formed on a top or bottom surface of the second gear.