US 12,729,425 B2Granted

Rotary cathode end block

AssigneeNcs Vacuum Technology (Hefei) Co., Ltd.

InventorJinshan You

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Abstract

A rotary cathode end block in this application comprises an end case body. A conductive drive shaft is rotatably installed in the end case body through a bearing, and one end of the drive shaft penetrates from the end case body and is fixedly connected with a target installation flange. A conductive central support is fixedly connected to the end case body. The central support is integrally formed with a connection shaft. One end of the connection shaft coaxially passes through the drive shaft and the target installation flange. A non-rotating electrical contact is set on the connection shaft. The central support is electrically connected with the electrical contact. The electrical contact is in contact with the drive shaft, and the contact surface between which is cone-shaped. The advantages of this application are larger transmission power and more reliable structure.

Claims19

Dependent claims

A rotary cathode end block, comprising:

an end case body, a conductive drive shaft is rotatably installed in the end case body through a bearing, and one end of the drive shaft penetrates from the end case body and is fixedly connected with a target installation flange;
a central support, fixedly connected to the end case body, the central support is integrally formed with a connection shaft, one end of the connection shaft coaxially passes through the drive shaft and the target installation flange;
an electrical contact, coaxially set on the connection shaft, the central support is electrically connected with the electrical contact, the electrical contact is in contact with the drive shaft, and a contact surface between which is cone-shaped,
wherein an end of the electrical contact is configured with a conical surface, a conical hole portion is formed inside the drive shaft, the electrical contact is arranged in the drive shaft, and the conical surface at the end of the electrical contact is in contact with the conical inner wall of the conical hole portion in the drive shaft.

1 more element

A rotary cathode end block, used to rotate a target with a bar magnet inside and electrically connects to an external power supply, comprising a drive shaft, used to connect the target to drive the target to rotate, and the drive shaft is made of conductive material, and further comprising an electrical contact for electrical connection, one of the electrical contact and the drive shaft is formed with a conical hole portion, and the other one of the electrical contact and the drive shaft is formed with a conical surface, the electric contact between the electrical contact and the drive shaft is maintained by the conical surface and the conical hole portion, and the electrical contact does not rotate with the drive shaft, the external power supply is electrically connected to the target through the electrical contact and the drive shaft in turn.

Dependencies are inferred from the claim text.