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US 12,727,472 B2Granted
Tapered antifuse
AssigneeInternational Business Machines Corporation
InventorsAshim Dutta, Chih-Chao Yang, Shravana Kumar Katakam
Life of this patent
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Abstract
A antifuse structure including a first metal sidewall spacer and a second metal sidewall spacer arranged on opposite sides of a tapered dielectric pedestal, and a fuse dielectric on top of the tapered dielectric pedestal and between the first metal sidewall spacer and the second metal sidewall spacer.
Claims17
An antifuse structure comprising:
- a first metal sidewall spacer and a second metal sidewall spacer arranged on opposite sides of a tapered dielectric pedestal;
- and
- a fuse dielectric on top of the tapered dielectric pedestal and between the first metal sidewall spacer and the second metal sidewall spacer, wherein tapered sidewalls of the tapered dielectric pedestal are flush with tapered sidewalls of the fuse dielectric.
An antifuse structure comprising:
- a first metal sidewall spacer and a second metal sidewall spacer arranged on opposite sides of a tapered pedestal;
- a fuse dielectric on top of the tapered pedestal and between the first metal sidewall spacer and the second metal sidewall spacer, wherein tapered sidewalls of the tapered pedestal are flush with tapered sidewalls of the fuse dielectric;
- a first conductive line below and in direct contact with the first metal sidewall spacer;
- and
- a second conductive line below and in direct contact with the second metal sidewall spacer.
2 more elements
An antifuse structure comprising:
- a first pair of metal sidewall spacers arranged on opposite sides of a first tapered pedestal;
- a first fuse dielectric on top of the first tapered pedestal and between the first pair of metal sidewall spacers, wherein tapered sidewalls of the first tapered pedestal are flush with tapered sidewalls of the first fuse dielectric;
- a second pair of metal sidewall spacers arranged on opposite sides of a second tapered pedestal;
- and
- a second fuse dielectric on top of the second tapered pedestal and between the second pair of metal sidewall spacers, wherein tapered sidewalls of the second tapered pedestal are flush with tapered sidewalls of the second fuse dielectric, and wherein a breakdown voltage of the first fuse dielectric is different than a breakdown voltage of the second fuse dielectric.
2 more elements
Dependencies are inferred from the claim text.