Workpiece attraction device

A workpiece attraction device, comprising:

• an electrostatic attraction body having an attraction electrode therein and a workpiece attraction surface capable of attracting a workpiece thereto by applying a voltage to the attraction electrode to generate a workpiece attraction force;
• and
• a workpiece separation body that is interposed between an attracted workpiece and the electrostatic attraction body, and assists in separating the workpiece from the workpiece attraction surface after application of voltage to the attraction electrode is stopped, wherein
• the workpiece separation body has a plurality of opening portions for applying the workpiece attraction force, generated on the workpiece attraction surface, toward a workpiece, and the workpiece separation body is partitioned into the opening portions by a lattice portion so that the opening portions are substantially uniformly present within a plane of the workpiece separation body, and
• a conductive shielding member is interposed between the lattice portion of the workpiece separation body and the attraction electrode of the electrostatic attraction body.

A workpiece attraction device, comprising:

• an electrostatic attraction body having an attraction electrode therein and a workpiece attraction surface capable of attracting a workpiece thereto by applying a voltage to the attraction electrode to generate a workpiece attraction force;
• and
• a workpiece separation body that is interposed between an attracted workpiece and the electrostatic attraction body, and assists in separating the workpiece from the workpiece attraction surface after application of voltage to the attraction electrode is stopped, wherein
• the workpiece separation body has a plurality of opening portions for applying the workpiece attraction force, generated on the workpiece attraction surface, toward a workpiece, and the workpiece separation body is partitioned into the opening portions by a lattice portion so that the opening portions are substantially uniformly present within a plane of the workpiece separation body,
• in a plan view from a workpiece side with a workpiece attracted, the attraction electrode of the electrostatic attraction body does not face the lattice portion of the workpiece separation body, and
• a conductive shielding member is interposed between the lattice portion of the workpiece separation body and the attraction electrode of the electrostatic attraction body.