Microstructure-transfer stamp component
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHideo Nakagawa, Yoshinori Ogawa, Toshiyuki Ozai
Life of this patent
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Abstract
A microstructure-transfer stamp component including a substrate and a silicone-based rubber film formed on the substrate, wherein a surface of the silicone-based rubber film facing away from the substrate has one or more recesses each being closed except for a surface opening. This provides a microstructure-transfer stamp component that can optimize temporary adhesive strength of the surface of the silicone-based rubber film stamp in a short period of time.
Claims21
A microstructure-transfer stamp component comprising a substrate and a silicone-based rubber film formed on the substrate, wherein
- one or more protrusions are formed on a surface of the silicone-based rubber film facing away from the substrate, and a surface of a protrusion of the one or more protrusions has one or more recesses, each of the recesses being closed except for a single surface opening, the single surface opening being on a side opposite of the substrate, and
- the one or more closed recesses are configured to define a closed space together with a microstructure in a state in which the microstructure is adhered to the surface of the silicone-based rubber film including the one or more closed recesses.
A microstructure-transfer stamp component comprising a substrate and a rubber film formed on the substrate, wherein
- one or more protrusions are formed on a surface of the rubber film facing away from the substrate, and a surface of a protrusion of the one or more protrusions has a plurality of recesses, each of the recesses being closed except for a single surface opening, the single surface opening being on a side opposite of the substrate, and
- the plurality of the closed recesses are configured to define a closed space together with a microstructure in a state in which the microstructure is adhered to the surface of the rubber film including the plurality of the closed recesses.
Dependencies are inferred from the claim text.