Semiconductor structure and method of preventing charging damage thereof
AssigneeUnited Microelectronics Corp.
InventorsMing-Te Lin, Wen-Chun Chang, Sung-Nien Kuo, Tzu-Chun Chen, Kuan-Cheng Su
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AssigneeUnited Microelectronics Corp.
InventorsMing-Te Lin, Wen-Chun Chang, Sung-Nien Kuo, Tzu-Chun Chen, Kuan-Cheng Su
Estimating the term…
A semiconductor structure is provided in the present invention, including a substrate, a deep N-well formed in the substrate, a first well formed in the deep N-well, a first gate formed on the first well, a first source and a first drain formed respectively at two sides of the first gate in the first well, a first doped region formed in the first well, and a metal interconnect electrically connected with the first source and the first doped region, wherein an area of the deep N-well multiplied by a first parameter is a first factor, an area of the first gate multiplied by a second parameter is a second factor, and an area of the metal interconnect divided by a sum of the first factor and the second factor is less than a specification value.
A semiconductor structure comprises:
A semiconductor structure comprises:
A method of preventing a semiconductor structure from charging damage, comprising:
Dependencies are inferred from the claim text.