Inspection device and inspection method
AssigneesTaikisha Ltd., Subaru Corporation
InventorsTadashi Sumii, Hidetsugu Nosaka, Tatsuya Hirose, Yusuke Tsurui
Life of this patent
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Abstract
Provided are an inspection device and an inspection method capable of controlling the positional relationship between a device and a measurement object to achieve an attitude enabling an appropriate detection of the surface conditions. The inspection device includes: a detector including a transmitter configured to transmit a transmission wave to a measurement object and a receiver configured to receive a return wave generated as a result of the transmission wave hitting the measurement object; and at least one sucker configured to suck the measurement object to regulate respective positions of the measurement object and the detector relative to each other.
Claims16
An inspection device comprising:
- a detector including a transmitter configured to transmit a transmission wave to a measurement object, a receiver configured to receive a return wave generated as a result of the transmission wave hitting the measurement object, and a contact surface for contact with the measurement object;
- and
- at least one sucker, which is positioned ahead of the contact surface in a pre-contact state that occurs prior to the contact surface contacting the measurement object, configured to suction the measurement object such that the measurement object contacts the contact surface to regulate respective positions of the measurement object and the detector relative to each other.
An inspection method involving use of an inspection device including:
- a detector including a transmitter configured to transmit a transmission wave to a measurement object, a receiver configured to receive a return wave generated as a result of the transmission wave hitting the measurement object, and a contact surface for contact with the measurement object;
- and
- a sucker, which is positioned ahead of the contact surface in a pre-contact state that occurs prior to the contact surface contacting the measurement object, configured to suction the measurement object,
- the inspection method comprising:
- suctioning the measurement object such that the measurement object contacts the contact surface;
- and
- detecting a condition of a surface of the measurement object suctioned by the sucker.
An inspection device comprising:
- a detector including a transmitter configured to transmit a transmission wave to a measurement object, a receiver configured to receive a return wave generated as a result of the transmission wave hitting the measurement object, and a contact surface for contact with the measurement object;
- at least one sucker configured to suction the measurement object such that the measurement object contacts the contact surface to regulate respective positions of the measurement object and the detector relative to each other;
- a force sensor configured to measure a magnitude of force with which the detector applies to the measurement object;
- and
- a driver configured to hold and move the detector and the sucker,
- wherein the driver is configured to move the detector, based on the magnitude of force measured by the force sensor, such that the magnitude of force measured by the force sensor is specified as an attitude in which the detector perpendicularly contacts the measurement object or an attitude in which the contact surface faces the measurement site.
Dependencies are inferred from the claim text.