Jet stream type plating device
AssigneeASKA CORPORATION Co., Ltd.
InventorTakayuki Furusawa
Life of this patent
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Abstract
Provided is a nozzle structure in a jet plating tank through which the nozzle structure can be installed in the reduced space with simple composition, the plating liquid can be almost uniformly jetted on the semiconductor wafer surface and decentralization and homogenization of the plating liquid in the plating tank can be conducted, thereby thickness growth can be promoted. In the nozzle structure, a plurality of jet paths in an opening portion of the nozzle for jetting the liquid formed plating are and decentralization and homogenization of the plating liquid in the plating tank are conducted by the plating liquid jetted from a terminal end opening portion of each jet path.
Claims4
A plating apparatus comprising a jet plating tank and a nozzle for jetting a plating liquid to a semiconductor wafer in the jetting plating tank,
- wherein the nozzle comprises a cylindrical pipe having an L-shape with a vertical pipe and a horizontal pipe, and an opening portion for jetting the plating liquid is disposed at an end of the horizontal pipe, and
- wherein L-shaped partition walls are disposed inside the vertical pipe and the horizontal pipe of the cylindrical pipe to form a plurality of jet paths to the opening portion, the L-shaped partition walls have vertical walls and horizontal walls, the vertical walls are parallel to each other, and the horizontal walls are parallel to each other.
A plating apparatus comprising a jet plating tank and a nozzle for jetting a plating liquid to a semiconductor wafer in the jetting plating tank,
- wherein the nozzle comprises a cylindrical pipe having an L-shape with a vertical pipe and a horizontal pipe, and an opening portion for jetting the plating liquid is disposed at an end of the horizontal pipe,
- wherein a perforated plate having a plurality of jet flow holes is disposed in the opening portion of the nozzle to form a plurality of jet paths for jetting the plating liquid, and
- wherein the opening portion, the vertical pipe, and the horizontal pipe have an identical inner diameter.
Dependencies are inferred from the claim text.