Method for arranging a semiconductor processing tool on a pedestal

A method for arranging a substrate processing tool on a pedestal within a semiconductor fabrication room, wherein the pedestal includes a plurality of pedestal plates supported by a pedestal frame including a plurality of stanchions, the method comprising:

• determining dimensions of the pedestal plates;
• determining locations of installation features of the pedestal plates in accordance with components of the substrate processing tool;
• generating an installation template indicating the locations of the installation features;
• machining the installation features in the pedestal plates based on the determined locations, using the installation template;
• marking at least one of the pedestal plates with at least one alignment feature;
• installing the pedestal frame on a subfloor of the semiconductor fabrication room, wherein the stanchions of the pedestal frame are positioned such that a weight distribution of the pedestal frame on the subfloor is different from a weight distribution of the substrate processing tool;
• orienting the at least one of the pedestal plates with the at least one alignment feature using an overhead transport system;
• and
• installing the pedestal plates on the pedestal frame in accordance with the installation features in the pedestal plates and the at least one alignment feature.