Rare-earth oxide based erosion resistant coatings for semiconductor application
AssigneeApplied Materials, Inc.
InventorsJennifer Y. Sun, Biraja P. Kanungo, Tom Cho
Life of this patent
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Abstract
An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 0 mol % to about 55 mol %, and Al2O3 in a range between about 0 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 30 mol % to about 60 mol %, ZrO2 in a range between about 0 mol % to about 20 mol %, and Al2O3 in a range between about 30 mol % to about 60 mol %.
Claims17
A component for a process chamber, comprising:
- a body comprising a planar surface comprising a roughened surface region having a roughness of about 100 μin to about 300 μin and an unroughened surface region;
- and
- a ceramic coating on the roughened surface region of the planar surface, wherein the ceramic coating comprises Y2O3 in a range from about 45 mol % to about 99 mol %, ZrO2 in a range from greater than 0 mol % to about 55 mol %, and Al2O3 in a range from greater than 0 mol % to about 10 mol %,
- wherein at least one surface of the ceramic coating comprises a post-polished surface roughness of about 6 μin to about 12 μin and a post-polished thickness of about 5 mil to about 25 mil, and
- wherein the ceramic coating comprises at least one of a tapered edge or a chamfered edge at an interface between the roughened surface region and the unroughened surface region of the body on the planar surface.
A method of manufacturing a component for a process chamber, the method comprising:
- providing a body comprising a planar surface comprising a roughened surface region having a roughness of about 100 pin to about 300 uin and an unroughened surface region;
- and
- coating the roughened surface region of the planar surface with a ceramic coating comprising Y2O3 in a range from about 45 mol % to about 99 mol %, ZrO2 in a range from greater than 0 mol % to about 55 mol %, and Al2O3 in a range from greater than 0 mol % to about 10 mol %,
- wherein at least one surface of the ceramic coating comprises a post-polished surface roughness of about 6 μin to about 12 μin and a post-polished thickness of about 5 mil to about 25 mil, and
- wherein the ceramic coating comprises at least one of a tapered edge or a chamfered edge at an interface between the roughened surface region and the unroughened surface region of the body on the planar surface.
Dependencies are inferred from the claim text.