Immersion fluid recovery system and immersion fluid recovery method using said system

An immersion fluid recovery system, comprising an immersion fluid supply and recovery apparatus and a recovery cavity, and characterized by further comprising a sealing extraction opening, a recovery flow path, a gas-liquid separator and an orifice plate;

• the sealing extraction opening and the recovery cavity are disposed around a terminal objective lens and are located in the immersion fluid supply and recovery apparatus above a substrate;
• the sealing extraction opening is located in the immersion fluid supply and recovery apparatus and is oriented toward the substrate, the sealing extraction opening extracts immersion fluid from a gap between the immersion fluid supply and recovery apparatus and the substrate, and also extracts, from the gap, gas at the radial outer side of the immersion fluid;
• the recovery cavity is located inside the immersion fluid supply and recovery apparatus and is in communication with the sealing extraction opening;
• the recovery cavity is in communication with, by means of the recovery flow path, a cavity of the gas-liquid separator disposed outside the immersion fluid supply and recovery apparatus;
• the orifice plate is disposed in the recovery flow path, the orifice plate has through holes in a fluid flow direction, and the size of a diameter of the through holes is less than the size of an inner diameter of a recovery pipe of the recovery flow path where the orifice plate is located;
• wherein an adapter is disposed in the immersion fluid supply and recovery apparatus, the adapter is disposed at the joint where the recovery flow path and the immersion fluid supply and recovery apparatus are connected, the immersion fluid supply and recovery apparatus and the recovery flow path facing the side where the gas-liquid separator is located are provided with a communicating recovery pipe, and the adapter is connected to the connection end between the immersion fluid supply and recovery apparatus and the recovery pipe;
• the adapter presses the orifice plate against the radial outer end face of the immersion fluid supply and recovery apparatus, and one end of the recovery pipe is fixedly connected to the adapter;
• and a through channel is disposed inside the adapter, and the through channel communicates with the internal space of the recovery pipe and the recovery cavity.