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US 12,717,238 B2Granted
Method and apparatus for mitigating tin debris
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCheng Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen
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Abstract
Microwave heating of debris collecting vanes within the source vessel of a lithography apparatus is used to accomplish uniform temperature distribution in order to reduce fall-on contamination and formation of clogs on the inner and outer surfaces of the vanes.
Claims20
An extreme ultra violet (EUV) lithography apparatus, comprising
- a chamber for generating EUV light;
- an optical axis in a direction towards a reticle stage;
- a plurality of vanes disposed on an inner surface of the chamber surrounding the optical axis;
- and
- a microwave generator configured to generate microwaves to heat the plurality of vanes,
- wherein the microwave generator is at least one of a klystron, a magnetron and a solid-state microwave power generator (SSPG).
3 more elements
An extreme ultra violet (EUV) lithography apparatus, comprising
- a chamber for generating EUV light;
- an optical axis in a direction towards a reticle stage;
- an excitation laser source for generating laser light;
- a droplet generator for generating a plurality of target droplets;
- a plurality of vanes disposed on an inner surface of the chamber surrounding the optical axis;
- and
- a microwave generator configured to generate microwaves to heat the plurality of vanes,
- wherein the microwave generator is at least one of a klystron, a magnetron and a solid-state microwave power generator (SSPG).
5 more elements
An extreme ultra violet (EUV) lithography method, comprising:
- activating a droplet generator and a laser generator configured to produce a plasma and EUV light within a chamber;
- generating EUV light in the chamber having an optical axis in a direction towards a reticle stage and a plurality of vanes disposed on an inner surface of the chamber surrounding the optical axis;
- generating microwaves to heat the plurality of vanes using a microwave generator;
- and
- directing the microwaves to an interior of the plurality of vanes using a conduit.
2 more elements
Dependencies are inferred from the claim text.