Imprint method, imprint apparatus, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsMasayoshi Fujimoto, Ryosuke Hamamoto
Life of this patent
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AssigneeCanon Kabushiki Kaisha
InventorsMasayoshi Fujimoto, Ryosuke Hamamoto
Estimating the term…
An imprint method of forming a patterned composition on a shot region of a substrate by using a mold having a concave-convex pattern includes filling a concave portion of the concave-convex pattern of the mold with a first composition by bringing the mold into contact with the first composition on a predetermined region and then separating the mold from the predetermined region in a state in which the first composition on the predetermined region is uncured. The mold having undergone the filling is brought into contact with a second composition on the shot region, thereby integrating the first composition filling the concave portion of the concave-convex pattern of the mold with the second composition on the shot region to form an integrated composition. The integrated composition is cured to form the patterned composition and separated from the mold.
An imprint method of forming a patterned composition on a shot region of a substrate by using a mold having a concave-convex pattern, the method comprising:
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