Leak detectors
AssigneeInficon GmbH
InventorJörn Liebich
Life of this patent
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AssigneeInficon GmbH
InventorJörn Liebich
Estimating the term…
A leak detection device (10) comprising a gas detector (12), a vacuum pump (14), a port for a test object (22) and a gas conducting path connecting the port to the gas detector (12) and the vacuum pump (14), is characterized in that the port (16) comprises a controllable isolation valve (20) for the selective opening or closing of the port (16), and that a pressure measurement device (24) for measuring the pressure at the port (16) is provided and the connection line (18) comprises a controllable venting valve (V3, V3a) for selectively allowing gas from the surrounding atmosphere to flow to the port (16) in a pulse-like manner, wherein the leak detection device (10) is configured to measure the pressure p(t1) at the port (16) at a first time t1 before the opening of the venting valve, thereafter to open and close the venting valve in a pulse-like manner and to measure the pressure p(t2) at the port (16) at least at a time t2>t1 after the closing of the venting valve and to determine, whether the isolation valve (20) is open or closed based on the measured pressures p(t1), p(t2).
A leak detection device comprising a gas detector, a vacuum pump, a port for a test object and a gas conducting path connecting the port to the gas detector and the vacuum pump,
A method for venting a leak detection device comprising a gas detector, a vacuum pump, a port for a test object and a connection line connecting the port to the gas detector and the vacuum pump, characterized by the following steps:
Dependencies are inferred from the claim text.