Systems and methods for detecting malfunctions within a gas distribution system

A non-transitory computer readable storage medium comprising instructions that, when executed by a processing device, cause the processing device to perform operations comprising:

• enabling, by a controller, gas flow through a first flow path of a gas distribution system, wherein the first flow path comprises:
• a gas stick comprising a first plurality of valves upstream of at least one of a pressure sensor or a flow sensor;
• a processing chamber fluidly coupled to the gas stick;
• and
• an exhaust conduit fluidly coupled to the processing chamber and configured to exhaust gas flow from the gas distribution system;
• receiving first data comprising at least one of first pressure data or first flow rate data associated with the first flow path of the gas distribution system while gas flow is enabled through the first flow path;
• processing the first data to determine whether the first flow path of the gas distribution system comprises a malfunction;
• responsive to determining that the first flow path comprises a malfunction, determining a relative location of the malfunction within the first flow path, with respect to the at least one pressure sensor or flow sensor within the first flow path;
• and
• generating a report indicating whether the first flow path comprises a malfunction and a relative location of any determined malfunction.

A system comprising:

• a memory device;
• and
• a processing device communicatively coupled to the memory device, wherein the processing device is configured to:
• enable gas flow through a first flow path of a gas distribution system, wherein the first flow path comprises:
• a gas stick comprising a first plurality of valves upstream of at least one of a pressure sensor or a flow sensor;
• a processing chamber fluidly coupled to the gas stick;
• and
• an exhaust conduit fluidly coupled to the processing chamber and configured to exhaust gas flow from the gas distribution system;
• receive first data comprising at least one of first pressure data or first flow rate data associated with the first flow path of the gas distribution system while gas flow is enabled through the first flow path;
• process the first data to determine whether the first flow path of the gas distribution system comprises a malfunction;
• responsive to determining that the first flow path comprises a malfunction, determine a relative location of the malfunction within the first flow path, with respect to the at least one pressure sensor or flow sensor within the first flow path;
• and
• generate a report indicating whether the first flow path comprises a malfunction and a relative location of any determined malfunction.