Thermal-curable composition for inkjet adaptive planarization
AssigneeCanon Kabushiki Kaisha
InventorsTimothy Brian Stachowiak, Weijun Liu
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Abstract
A curable composition can comprise a polymerizable material and an initiator, wherein the polymerizable material can comprise at least one multi-functional vinylbenzene monomer in an amount of at least 70 wt % based on the total weight of the polymerizable material; the at least one initiator includes an azo-compound; and wherein a cured layer of the curable composition has a linear shrinkage after a baking treatment at 350° C. of not greater than 3.0%.
Claims18
A curable composition comprising a polymerizable material and at least one initiator, wherein
- the polymerizable material comprises at least one multi-functional vinylbenzene monomer in an amount of at least 95 wt % based on the total weight of the polymerizable material;
- the multi-functional vinylbenzene monomer consists essentially of a divinylbiphenyl (DVBPh) monomer and a trivinylbiphenyl (TVBPh) monomer;
- the at least one initiator includes an azo-compound;
- and
- a cured layer of the curable composition has a linear shrinkage after a baking treatment at 350° C. of not greater than 3.0%.
A method of forming a cured layer on a substrate, comprising:
- applying a layer of a curable composition on the substrate, wherein the curable composition comprises a polymerizable material and at least one initiator, the polymerizable material comprises at least one multi-functional vinylbenzene monomer in an amount of at least 95 wt % based on the total weight of the polymerizable material, the multi-functional vinylbenzene monomer consists essentially of a divinylbiphenyl (DVBPh) monomer and a trivinylbiphenyl (TVBPh) monomer, and the at least one initiator includes an azo-compound;
- bringing the curable composition into contact with a superstrate;
- curing the curable composition to form a cured layer;
- and
- removing the template or the superstrate from the cured layer,
- wherein the cured layer has a thermal shrinkage after a baking treatment at 350° C. of not greater than 3.0%.
A method of manufacturing an article, comprising:
- applying a layer of a curable composition on a substrate, wherein the curable composition comprises a polymerizable material and at least one initiator, the polymerizable material comprises at least one multi-functional vinylbenzene monomer in an amount of at least 95 wt % based on the total weight of the polymerizable material, the multi-functional vinylbenzene monomer consists essentially of a divinylbiphenyl (DVBPh) monomer and a trivinylbiphenyl (TVBPh) monomer, and the at least one initiator includes an azo-compound;
- bringing the curable composition into contact with a template or a superstrate;
- curing the curable composition to form a cured layer;
- removing the template or the superstrate from the cured layer, wherein the cured layer has a thermal shrinkage after a baking treatment at 350° C. of not greater than 3.0%;
- forming a pattern on the substrate;
- processing the substrate on which the pattern has been formed in the forming;
- and
- manufacturing an article from the substrate processed in the processing.
Dependencies are inferred from the claim text.