Suction pad

A suction pad comprising:

• a body;
• and a sponge member,
• wherein the body includes a negative pressure chamber, and a plurality of communication passages configured to communicate with the negative pressure chamber, and the sponge member includes a plurality of cavities configured to open toward a workpiece and communicate with the negative pressure chamber through the communication passages,
• a flow passage adjustment valve configured to adjust a flow passage area is disposed in each of the communication passages, and when vacuum pressure is generated in the negative pressure chamber and a cavity among the plurality of cavities is not closed by the workpiece, a flow passage area of a communication passage among the communication passages that corresponds to the cavity that is not closed by the workpiece is adjusted to be decreased,
• the suction pad further comprises a pressure detection port configured to detect pressure in at least one cavity among the plurality of cavities,
• wherein:
• the body includes a detection passage configured to communicate with a corresponding one of the cavities of the sponge member,
• the detection passage vertically passes through the body, and
• an end of the detection passage forms the pressure detection port.