Methods and assemblies for gas flow ratio control

A master controller for controlling flow of a gas to a process chamber, comprising:

• a set of one or more processing devices, wherein the set of one or more processing devices are to:
• identify a flow ratio setpoint for at least one of a process gas flow or a carrier gas flow to the process chamber through a plurality of mass flow controllers, wherein each of the plurality of mass flow controllers are configured to flow at least one of a process gas or a carrier gas from a process gas supply and via a distribution manifold into a respective zone of the process chamber;
• determine an amount of gas loss due to an abatement sub-system coupled to at least one of a flow ratio apparatus configured to control a back pressure of the distribution manifold or the process chamber;
• determine a flow setpoint for the at least one of the process gas flow or the carrier gas flow through each of the plurality of mass flow controllers based on the identified flow ratio setpoint and the determined amount of gas loss;
• and
• control the at least one of the process gas flow or the carrier gas flow through each of the plurality of mass flow controllers according to the determined flow setpoint for each of the plurality of mass flow controllers.

A method for controlling flow of a gas to a process chamber, the method comprising:

• identifying, by a master controller, a flow ratio setpoint for at least one of a process gas flow or a carrier gas flow to the process chamber through a plurality of mass flow controllers, wherein each of the plurality of mass flow controllers are configured to flow at least one of a process gas or a carrier gas from a process gas supply and via a distribution manifold into a respective zone of the process chamber;
• determining, by a master controller, an amount of gas loss due to an abatement sub-system coupled to at least one of a flow ratio apparatus configured to control a back pressure of the distribution manifold or the process chamber;
• determining, by the master controller, a flow setpoint for the at least one of the process gas flow or the carrier gas flow through each of the plurality of mass flow controllers based on the identified flow ratio setpoint and the determined amount of gas loss;
• and
• controlling, by the master controller, the at least one of the process gas flow or the carrier gas flow through each of the plurality of mass flow controllers according to the determined flow setpoint for each of the plurality of mass flow controllers.