Processing liquid supply apparatus and processing liquid supply method
AssigneeTokyo Electron Limited
InventorsKazuya Hashimoto, Hikaru Akada
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AssigneeTokyo Electron Limited
InventorsKazuya Hashimoto, Hikaru Akada
Estimating the term…
A processing liquid supply apparatus for supplying a processing liquid to a substrate processing apparatus including a liquid processing module configured to process a substrate with the processing liquid, comprising: a transfer region where a transfer mechanism configured to hold and transfer a container storing the processing liquid is provided, and a pair of supply regions provided to face each other via the transfer region, wherein a supporter configured to support the container loaded from an outside of the processing liquid supply apparatus and a connection pipe connected to the container supported by the supporter are provided in each of the pair of supply regions, and the processing liquid in the container supported by the supporter is supplied to the substrate processing apparatus via the connection pipe.
A processing liquid supply apparatus for supplying a processing liquid to a substrate processing apparatus including a liquid processing module configured to process a substrate with the processing liquid, the processing liquid supply apparatus comprising:
A processing liquid supply method of supplying a processing liquid to a substrate processing apparatus including a liquid processing module configured to process a substrate with the processing liquid, the processing liquid supply method comprising:
Dependencies are inferred from the claim text.