Vertical motion axis for imaging optical head
AssigneeOrbotech Ltd.
InventorsTal Goichman, Ashkan Aghajani, Arkady Bronfman
Life of this patent
Estimating the term…
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AssigneeOrbotech Ltd.
InventorsTal Goichman, Ashkan Aghajani, Arkady Bronfman
Estimating the term…
A translation stage may include a first plate and a second plate moveable with respect to the first plate along a vertical direction. The stage may also include one or more magnetic counterbalances opposing the weight of the second plate, where at least one of the one or more magnetic counterbalances comprises a tunable magnetic counterbalance. A tunable magnetic counterbalance may include a first portion including one or more magnets and a second portion including one or more ferromagnetic materials, where the one or more ferromagnetic materials at least partially surround the one or more magnets in a horizontal plane. The counterbalance force may be adjustable by controlling at least one of a relative rotation angle between the first and second portions in the horizontal plane or a length of the gap along at least one direction. The stage may also include an actuator to position the second plate.
A translation stage comprising:
A system comprising:
A method comprising:
Dependencies are inferred from the claim text.