Laser lithography device and method for producing a three-dimensional structure
AssigneeNanoscribe Holding GmbH
InventorsMarc Hippler, Michael Thiel
Life of this patent
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Abstract
A laser lithography device for producing a three-dimensional structure in a lithographic material comprising a laser source for emitting a laser writing beam and a lens for focusing the laser writing beam in a focus region. The lens has an optical terminating element. Furthermore, the laser lithography device comprises a scanning device for displacing the focus region of the laser writing beam relative to the lithographic material and a protection device for preventing contact between the optical terminating element and the lithographic material. The protection device is arranged on the optical terminating element.
Claims14
A laser lithography device for producing a three-dimensional structure in a lithographic material, the laser lithography device comprising:
- a laser source for emitting a laser writing beam;
- a lens for focusing the laser writing beam in a focus region, wherein the lens has an optical terminating element;
- a scanning device for displacing the focus region of the laser writing beam relative to the lithographic material;
- and
- a protection device for preventing contact between the optical terminating element and the lithographic material, wherein
- the protection device is arranged directly on the optical terminating element,
- the protection device has an adhesive layer for fastening the protection device to the optical terminating element, and
- the protection device is a sticker or an adhesive tape.
A method for producing a three-dimensional structure in a lithographic material, the method comprising:
- emitting a laser writing beam;
- focusing the laser writing beam in a focus region;
- displacing the focus region of the laser writing beam relative to the lithographic material;
- and
- preventing contact between an optical terminating element and the lithographic material by using a protection device, wherein the protection device is a sticker or an adhesive tape.
Dependencies are inferred from the claim text.