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US 12,696,757 B2Granted
Antifuse and resistor
AssigneeInternational Business Machines Corporation
InventorsAshim Dutta, Chih-Chao Yang, Kishan Jayanand
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Abstract
A horizontal antifuse structure including a fuse dielectric layer, two slanted annular metal structures arranged adjacent to and opposite one another, wherein bottom portions of the two slanted annular metal structures are embedded in the fuse dielectric layer.
Claims20
An antifuse structure comprising:
- a fuse dielectric layer;
- and
- two slanted annular metal structures arranged adjacent to and opposite one another, wherein bottom portions of the two slanted annular metal structures are embedded in the fuse dielectric layer.
An antifuse structure comprising:
- a fuse dielectric layer;
- a top dielectric layer directly on the fuse dielectric layer;
- and
- two slanted annular metal structures arranged adjacent to and opposite one another, wherein only bottom portions of the two slanted annular metal structures are embedded in the fuse dielectric layer.
1 more element
An antifuse structure comprising:
- a fuse dielectric layer;
- a top dielectric layer directly on the fuse dielectric layer;
- and
- two slanted annular metal structures arranged adjacent to and opposite one another, wherein only bottom portions of the two slanted annular metal structures are embedded in the fuse dielectric layer, wherein each of the two slanted annular metal structures comprises a metal liner surrounding a bottom and sides of an inner core.
1 more element
Dependencies are inferred from the claim text.