Systems and methods for distributing light delivery
AssigneeASML Netherlands B.V.
InventorsJasper Winters, Erwin John Van Zwet, Marcus Johannes Van Der Lans, Pieter Willem Herman De Jager, Geerten Frans Ijsbrand Kramer
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Abstract
A method for improved sequencing of light delivery in a lithographic process includes determining a sequence of intensities of light to be delivered that includes an interval within the sequence of intensities where substantially no light is delivered to the substrate and delivering light to a substrate by a light source utilizing a digital mirror device (DMD) according to the sequence of intensities.
Claims20
A method for improved sequencing of light delivery in a lithographic process, the method comprising:
- determining a time-based sequence of intensities of light and a distribution of the determined time-based sequence of intensities to be delivered to a substrate, wherein the determined time-based sequence includes a plurality of intervals that includes an interval within the determined time-based sequence of intensities where substantially no light is delivered to a substrate;
- and
- delivering light to a substrate by a light source utilizing a digital mirror device (DMD) according to the plurality of intervals of the determined time-based sequence of intensities.
A method for improved sequencing of light delivery in a lithographic process, the method comprising:
- determining a target intensity of light to deliver to a spot at a substrate;
- determining a sequence of intensities of light to be delivered to the substrate by a digital mirror device (DMD) to reach the target intensity, the sequence of intensities including an interval within the sequence of intensities where substantially no light is delivered to the substrate;
- storing, in a physical memory, a set of instructions for the sequence of intensities of light;
- and
- delivering light to the substrate by a light source utilizing the DMD according to the sequence of intensities, wherein the presence of the interval reduces an influence of an upcoming set of instructions in the sequence of intensities that is stored in the physical memory for a configuration of the DMD.
A system for delivering light to a substrate, the system comprising:
- a light source;
- a digital mirror device;
- a physical memory configured to store instructions for delivery of light from the light source utilizing the digital mirror device;
- and
- a non-transitory computer readable medium having instructions recorded thereon, the instructions when executed by one or more processors of the system cause the system to perform operations comprising:
- determining a target intensity of light to deliver to a spot at a substrate;
- determining a sequence of intensities of light to be delivered to the substrate by a digital mirror device (DMD) to reach the target intensity, the sequence of intensities including an interval within the sequence of intensities where substantially no light is delivered to the substrate;
- storing, in a physical memory, a set of instructions for the sequence of intensities of light;
- and
- delivering light to the substrate by a light source utilizing the DMD according to the sequence of intensities, wherein the presence of the interval reduces an influence of an upcoming set of instructions in the sequence of intensities that is stored in the physical memory for a configuration of the DMD.
Dependencies are inferred from the claim text.