Precursor supply system
AssigneeSamsung Electronics Co., Ltd.
InventorsKyungrim Kim, Youngeun Kim, Youngjun Kim, Jihoon Kim, Taekjung Kim, Dongju Chang
Life of this patent
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Abstract
A precursor supply system includes a storage tank storing the precursor in a solid state; a transfer pipe connected to the storage tank to transfer the precursor in a solid state; a phase converter connected to the transfer pipe and sublimating the transported solid-state precursor into vapor; a supply pipe connected to the phase converter and transporting a precursor in a vaporous state; and a process chamber disposed adjacently to the phase converter and connected to the supply pipe.
Claims20
A precursor supply system, comprising:
- a storage tank configured to store a precursor in a solid state;
- a transfer pipe connected to the storage tank, the transfer pipe being configured to transfer the precursor in the solid state;
- a phase converter connected to the transfer pipe, the phase converter being configured to receive the precursor in the solid state from the storage tank through the transfer pipe, and being configured to sublime the precursor in the solid state from a solid state into a vaporous precursor,
- a supply pipe connected to the phase converter, the supply pipe being configured to transport the vaporous precursor;
- and
- a process chamber adjacent to the phase converter and connected to the supply pipe, the process chamber being configured to receive the vaporous precursor from the phase converter through the supply pipe.
A precursor supply system, comprising:
- a storage tank configured to store a precursor in a solid state;
- a transfer pipe connected to the storage tank, the transfer pipe being configured to transfer the precursor in the solid state by a pressure difference between opposite ends of the transfer pipe;
- a phase converter connected to the transfer pipe, an internal pressure of the phase converter being smaller than an internal pressure of the storage tank, and the phase converter being configured to receive the precursor in the solid state from the storage tank through the transfer pipe, and being configured to sublime the precursor in the solid state from a solid state into a vaporous precursor;
- a supply pipe connected to the phase converter, the supply pipe being configured to transport the vaporous precursor;
- and
- a process chamber connected to the supply pipe, the process chamber being configured to receive the vaporous precursor from the phase converter through the supply pipe.
Dependencies are inferred from the claim text.