Method for manufacturing vibration power generation device and vibration device

A method for manufacturing a vibration power generation device including a support portion having a first support portion and a second support portion, a movable portion that is displaced in a first direction with respect to the support portion, a movable electrode finger coupled to the movable portion, and a fixed electrode finger coupled to the support portion, the method comprising:

• first silicon substrate patterning for patterning a first silicon substrate by etching to form the first support portion and the fixed electrode finger;
• second silicon substrate patterning for patterning a second silicon layer of a second silicon substrate in which a first silicon layer and the second silicon layer are laminated by etching to form the movable electrode finger and patterning the first silicon layer by etching to form the second support portion and the movable portion;
• electret film forming for forming an electret film at one of the movable electrode finger and the fixed electrode finger;
• and
• bonding for bonding the first silicon substrate to the second silicon layer side of the second silicon substrate such that the movable electrode finger and the fixed electrode finger face each other.