Method of controlling fluid flow

A method of controlling fluid flow comprising:

• providing a processing system comprising a first fluid supply configured to supply a first process fluid, the first fluid supply fluidly coupled to an inlet of a first apparatus for controlling flow, and a second fluid supply configured to supply a second process fluid, the second fluid supply fluidly coupled to a second apparatus for controlling flow;
• delivering the first process fluid to a processing chamber fluidly coupled to an outlet of the first apparatus for controlling flow;
• and
• venting the first process fluid to a vent manifold fluidly coupled to a bleed port of the first apparatus for controlling flow at a first flow rate and simultaneously venting the second process fluid to the vent manifold fluidly coupled to a bleed port of the second apparatus for controlling flow at a second flow rate to control a concentration of the first process fluid within the vent manifold below a second threshold, the second flow rate actively controlled by a proportional valve of the second apparatus for controlling flow to maintain the concentration of the first process fluid below the second threshold.

A method of controlling fluid flow comprising:

• providing a processing system comprising a first fluid supply configured to supply a first process fluid, the first fluid supply fluidly coupled to an inlet of a first apparatus for controlling flow, and a second fluid supply configured to supply a second process fluid, the second fluid supply fluidly coupled to a second apparatus for controlling flow;
• venting the first process fluid to a vent manifold fluidly coupled to a bleed port of the first apparatus for controlling flow at a first flow rate into the vent manifold, a concentration of the first process fluid within the vent manifold being below a threshold;
• and
• delivering the first process fluid to a processing chamber fluidly coupled to an outlet of the first apparatus for controlling flow;
• wherein the first apparatus for controlling flow comprises a flow restrictor configured to control flow from the bleed port of the first apparatus for controlling flow, a bleed valve of the first apparatus for controlling flow preventing flow through the flow restrictor when the bleed valve is in a closed state.