Optical system, test device, lithography apparatus, arrangement and method

A method for checking a function of an electronics unit of an optics module, the optics module comprising:

• a number of displaceable optical elements configured to guide radiation, the number of displaceable optical elements comprising a first optical element;
• a number of actuator/sensor devices comprising a first actuator/sensor device, the first actuator/sensor device configured to displace the first optical element and/or to acquire a position of the first;
• a vacuum-tight housing, wherein:
• the electronics unit is arrangeable in the vacuum- tight housing;
• the electronics unit is configured to actuate the first actuator/sensor device based on received actuation data;
• the electronics unit comprises a first electronics region and a second electronics region, the first electronics region comprises a number of electrical and/or electronic component parts that generate during operation a first thermal power loss that is less than or equal to a predetermined threshold value;
• the second electronics region comprising a number of electrical and/or electronic component parts that generate during operation a second thermal power loss above the predetermined threshold value, the method comprising:
• coupling the electronics unit and/or the optics module to a test device;
• operating the first electronics region without the second electronics region being operated;
• and
• checking an intended function of the first electronics region.

A method of producing an optical system comprising a number of optics modules, wherein:

• each of at least some of the optics modules comprises:
• a number of displaceable optical elements configured to guide radiation in the optical system;
• a number of actuator/sensor devices;
• a vacuum-tight housing;
• and an electronics unit, wherein:
• a first actuator/sensor device being assigned to a first optical element;
• the first actuator/sensor device being configured to displace the first optical element and/or to acquire a position of the first optical element;
• the electronics unit is arrangeable in the vacuum-tight housing;
• the electronics unit is configured to actuate the first actuator/sensor device based on received actuation data;
• the electronics unit comprises a first electronics region and a second electronics region;
• the first electronics region comprises a number of electrical and/or electronic component parts that generate during operation a first thermal power loss that is less than or equal to a predetermined threshold value;
• and the second electronics region comprising a number of electrical and/or electronic component parts and that generate during operation a second thermal power loss above the predetermined threshold value, the method comprising:
• providing the components of the optics module;
• coupling the electronics unit and/or the optics module to a test device;
• operating the first electronics region without the second electronics region being operated;
• checking an intended function of the first electronics region;
• and
• integrating the optics module when the function of the electronics unit is present.